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Key Features
- UPH up to 4000 (±10µM @ 3sigma,
including Flip-Chip)
- UPH up to 1200 (±3µM @ 3sigma,
including Flip-Chip)
- Flip-Chip & Die Attach options
- Automatic load of Wafer & Substrate
- Dynamic alignment
- Eutectic bonding via diode-laser or
heating plate & hot bond tool
- Epoxy stamping & dispensing
options
- Micro dispensing; dot size up to
150µM
- Wafer mapping
- Active bond force control
- Post bond inspection
- Wafer mapping
- Modular machine concept
- Easy configure software
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